A variety of problems connected to modeling of signals of electronic emission sensors arise while researching of processes of electron-solid interactions in SEM by Monte-Carlo methods. These are the problems of modeling of SEM video signals, electron and x-ray spectra measured in microanalyzers. On the basis of Monte-Carlo model of electron-solid interactions the model of formation of a sensors signals of such types was constructed. The analysis of processes of SEM video signals formation by various combinations of these sensors and also the analysis of measurement of emission spectra was carried out. The possibility of the application of computing-measurement systems theory for the decision of problems of interpretation of the signals measured on sensors of such type is shown also.