The results of our work will ensure solution of some problems of microelectronics, optoelectronics, photonics and materials research. The proposed methods allow us to obtain nanometer-scale layers with unusual electrical, optical, magnetic, mechanical and chemical properties, and uniform thickness.

The proposed new nanotechnologies significantly simplify production of the devices, particularly a double-layer photomask with elements having semitransparent Si masking edges and photomasks with semitransparent nano-sized adjacent elements of different thickness fabricated by single conventional optical photolithography. The abovementioned and other advantages significantly extend the possibilities of the device designs and their functional purposes, provide simplification of removal of undesirable gases and heat dissipation [1, 2]. This nanotechnology is also promising for fabrication of nanowires, microelectrodes for new micro- and nano- electrodeposition techniques, press molds with nano-sized pillars (tips) for nanoimprint lithography, etc.

The developed methods of fabrication of ultra-thin void-free and pore-free electroless coatings on micro-, meso- and nano-sized particles (carbides, borides, nitrides, oxides, graphite, diamond, zeolites, etc.) provides fabrication of nanostructured composite materials and coatings with the specified properties. The method allows us to vary the properties of the coatings in the wide range. Incorporation of metallized powder- like particles into metals, alloys, ceramics or plastics can significantly increases their strength, microhardness, wear resistance, temperature and radiation stability, and provides dry lubrication.

The competitive methods, which allow substitution of palladium chloride with inexpensive non-precious substances for activation of nano-sized powder-like particles before electroless metallization, were developed.

A gram of the powder-like particles of the 1 m diameter contains 10¹² particles and their total surface area is 150 m². The metallized micro-, meso- and nano-sized particles having the specified catalytic activity and very large specific surface area can be also successfully used for capturing toxic gases, cleaning the environment, etc. The abovementioned specified properties of metallized micro-, meso- and nano-sized particles provide great possibilities of their application in a biomedical field, in medical practice, etc.
References

1. Khoperia T.N., Investigation of the Mechanism and Kinetics of Activation for Electroless Plating and Competitive Submicron and LIGATechnologies, in Fundamental Aspects of Electrochemical Deposition and Dissolution Including Modeling, PV 99-33, pp.251-262, The Electrochemical Society Proceedings Series, Pennington, NJ, USA
2. Khoperia T.N., Investigation of Metal film Adhesion to Dielectrics and Production of 3-D Microdevices by Electroless Deposition, in Fundamental Aspects of Electrochemical Deposition and Dissolution Including Modeling, PV 99-33, pp.147-155, The Electrochemical Society Proceedings Series, Pennington, USA (2000).