We present the enhanced magnetotransport and thermal properties of FeMn
exchange-biased magnetic tunnel junctions (MTJs) by rapid thermal
anneal (RTA). The tunneling magnetoresistance (TMR) in an as-grown MTJ
is found to be
27%, while
the TMR in MTJs annealed by RTA ( < 2 min.) increases with annealing
temperature up
to 300 oC, reaching
46%. TEM images reveal a significant structural
change at the
interface of Al2O3 layer for the MTJ annealed by RTA, which is
attributable to oxygen
redistribution and homogenization in the insulating layer during RTA,
leading to the
improvement of TMR. We also found that remarkable changes in effective barrier
thickness and height occur within a few ten seconds during RTA,
indicating that the
structural transformation in the oxide barrier takes place abruptly
at the initial step of
the anneal. More importantly, we found that RTA provides structural
robustness for
MTJs, resulting in a heat-resistant junction structure to a subsequent
thermal treatment.
It is believed to be due to an additional RTA effect to reduce
structural defects in the
CoFe pinned layer, preventing the interdiffusion of Mn at the interface
of CoFe and
FeMn or the diffusion of Mn to the oxide barrier. We discuss the detailed
mechanism for
the enhanced thermal stability by RTA with the results of soft X-ray
fluorescence
spectroscopy and Auger electron spectroscopy.