GHz Counting Rate NbN Single-Photon Detector for IR Diagnostics of VLSI CMOS
Circuits
Andrey Lipatov1 (

), A. Korneev
1,
O. Okunev
1, Galina Chulkova
1,
K. Smirnov
1, G. Gol'tsman
1,
J. Zhang
2, W. Slysz
2, A. Verevkin
2,
Roman Sobolewski
2
1Department of Physics, Moscow State Pedagogical University,
Moscow, 119992, Russia.
2Department of Electrical and Computer Engineering and
Laboratory of Laser Energetics, University of Rochester, Rochester, NY 14627-0231, USA
Passive optical probing, utilizing the natural light emissions from a
switching field effect transistor (FET), can be used to provide significant
information about CMOS operation. In a normally operating circuit, the
emission is synchronous with the switching events. Thus the light emission
carries timing information from the circuit that can be extracted only using
the time-correlated single-photon detector. The radiation is primarily in the
near infrared band (1.0 – 1.5mm) and its observation through the chip
substrate is desired, that limits the operation band by silicon transparency
window above 1.1 mm. The currently available single photon detectors such as
APDs and photomultiplier tubes suffers from a sharp decrease of sensitivity
above 1 mm and their utilization makes impossible the diagnostic of the chip
in a real manufacturing cycle.We present a new superconductive technology
providing us with a simple to manufacture, single-photon detector and counter
(SPD), which can work from ultraviolet to near-infrared bands. The tested
SPD’s were fabricated from superconducting NbN 3.5 and 10-nm-thick films. The
devices were patterned into narrow (200-nm-wide) meander-type structures,
covering 10x10 mm2 area, and is proved to operate in the single-photon mode in
0.4–3.0 µm band. The photo response signal magnitude did not depend on the
photon energy and is determined by the value of the bias current. The width of
the response pulse was below 100 ps and and jitter is less then 30 ps. The
signal-noise ratio was above 30dB with amplifier's noise temperature of 200
K. The value of the device quantum efficiency depends on the light wavelength
and varied from to 20% for 850-nm and ~10% for 1550-nm radiation. The
experimental value for the detector dark counts was negligibly small. The
above parameters clearly demonstrate that superconducting SPD is more
sensitive and much faster than any currently existing semiconductor
counterparts.