Key circumstance of radical progress for technology of XXI century is the development of a technique which provides controllable producing three-dimensional patterns incorporating regions of nanometer sizes and required physical and chemical properties. Our paper for the first time proposes the method of purposeful direct transformation of the most important substance physical properties, such as electrical, magnetic, optical and others by controllable modification of solid state atomic constitution. Discovered by us effect of selective atom removing out of thin di- and polyatomic films by beams of accelerated particles might be the basis of new non-litography technology. Potentials of that technique have been investigated and confirmed by our numerous experiments. It has been shown, particularly, that selective atom removing allows to transform in a controllable way insulators into metals, non-magnetics into magnetics, to change radically optical features and some other properties of materials. The opportunity to remove selectively atoms of a certain sort out of solid state compounds is, as such, of great interest in creating technology associated primarily with needs of nanoelectronics as well as many other “nano-problems” of XXI century.